We have a robust background in the semiconductor manufacturing industry, and have a specific emphasis on the unique safety and high-hazard chemical/gas delivery systems that pose unique challenges to this industry.
Fab and Tool Safety
Tool Safety
Our skillset includes assessing tool design and developing the safety elements, such as minimum exhaust and ventilation rates, placement of gas sensors, design of excess flow switches and flow restricting orifices. We can safely design a tool’s safety and specialty gas and chemical system from scratch based on datasheets and the vendor’s S2, or adapt tools from a different fab or region to meet local codes.
Basebuild and Fab Safety
We can design basebuild safety systems and perform the safety assessments. This includes backbone TGMS/HPM-LSS systems, and backbone gas detection hardware (such as UVIR Chemcassette devices). We can also design room and area protection and detection systems for HPM (hazardous production material) rooms, spaces and distribution infrastructure, and would also include gas and leak detection for valve boxes, tanks and similar equipment. This may also include air sampling smoke detection/early warning smoke detection (ASSD/EWSD) or ultra-violet, infrared hardware for early smoke detection and potential gas and chemical shutoff in case of hazardous situations.
Industrial Hygiene and EHS (Engineering Controls)
From both the tool and basebuild aspects of the fab, we can help with the industrial hygiene assessment, including dilution, credible leak rates, failure mode assessment and toxicity and flammability analysis. We can design the engineering controls required under EHS rules, and advise the owner on administrative controls that may be required to ensure safe operations.
Tool Install
We have a broad tool install offering, including mechanical systems, controls systems and gas detection. We can integrate with your design team to meet your specifications and design needs. Our primary focus is on the specialty services such as process chemicals, process gases, and the related controls, leak detection, and failure mode specifics to meet code and client-specific safety and design requirements.
We can provide complete PFDs, P&IDs or other design drawings and blueprints, and generate or adapt specifications to meet the needs of your tool install construction team.
Specialty Process and Bulk Gases and Chemicals
We have extensive experience in gas and chemical system design, including piping, double containment, high purity piping, stainless and gas detection and chemical detection and leak monitoring. This includes gas and chemical distribution infrastructure such as distribution valve boxes (DVBs), valve manifold boxes (VMBs), gas cabinets, gas concentrators and purifiers for on-site generation, chemical tanks, blenders and similar specialty equipment. We also design on the chemical side, including integration of vendor equipment to the facility, stick-built equipment on site, and ultimately integration of the gas and chemical supplies into the tools.
Basebuild and Fab Design
Designing a fab is a monumental effort requiring a large design multi-disciplinary design team often comprised of many firms’ collective contributions.
Telluride Engineering has a comprehensive background integrating into such design teams, leveraging our specialized knowledge in the process gases, chemicals and life safety systems to ensure a safe and complete fab design. We’re well-versed in requirement generation and communication such as is required to monitor other disciplines’ equipment, or utilities that our systems may require to function. We routinely engage in space planning, off-site manufacturing planning and design and other broad efforts required.
Our design team has been integral in greenfield and brownfield fab designs in many regions.
